Silane | Silanes | Alkyl Silanes | Developmental
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SiSiB® PC5401
Tetramethylsilane.
Synonym: Tetramethylsilane
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SiSiB® organosilanes basic structure is RnSi(OR)4-n, wherein "R" is an alkyl, aryl, or other organofunctional group and "OR" is a methoxy, ethoxy, or acetoxy group.
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Typical Physical Properties |
Chemical Name: |
Tetramethylsilane |
CAS No.: |
75-76-3 |
EINECS No.: |
200-899-1 |
Empirical Formula: |
C4H12Si |
Molecular Weight: |
88.22 |
Boiling Point: |
26.6°C [760mmHg] |
Flash Point: |
-28°C |
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Color and Appearance: |
Colorless clear liquid |
Density [25°C]: |
0.641 |
Refractive Index [25°C]: |
1.3588[25°C] |
Purity: |
98% by GC |
SiSiB® PC5401 is used for PECVD of low k dielectric and barrier layers in damascene metallization applications. |
Net weight 120Kg steel drum, for more details, please visit Packing Centre.
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